Course Prefix:BECourse #: 480Keywords:showing 0 to 1
BE 480LLB BioMEMS Fabrication Laboratory
An introduction into design and fabrication of microelectro mechanical systems for biological and biomedical applications (BioMEMS). Goal is to introduce students to the practice of device fabrication including mask layout, photolithography, chemical etching, thin film deposition, and polymer micromolding through hands on laboratory sessions. Basic cleanroom etiquette and device metrology will also be covered.
3 Grading: Graded (GRD) Typically Offered:
Spring Requisites: Pre-Requisite: BE 305 and BE 312 and approved BME majors only.