Covers various commonly used micro/nanofabrication techniques, microfluidics, various chemical and biochemical applications such as separation, implantable devices, drug delivery, and microsystems for cellular studies and tissue engineering. Discusses recent and future trends in BioMEMS and nanobiosensors. Students will gain a broad perspective in the area of micro/nano systems for biomedical and chemical applications. This course is dual-listed with EE 528.