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Course Prefix: MAE   Course #: 484   Keywords:     showing 0 to 1

MAE 484LEC Nano/Microtechnologies for (bio)MEMS

Lecture

Introduces advanced technologies that enable integration of micro-sensors and micromechanical components on the same chip to produce miniature devices called micro electromechanical systems (MEMS). The course covers physical principles and design rules that govern the performance of a device at small length scales. Discuss a large set of microfabrication techniques including photolithography, material removal processes, and additive technologies. Discuss the applications of MEMS devices in automotive, communication, energy, and BioMEMS in biomedical applications.

Credits: 3
Grading: Graded (GRD)
Typically Offered: Fall
Requisites: Pre-Requisite: MAE 381; ASE and ME Majors only.
Visit the Office of the Registrar’s Class Schedules page for more detailed and updated information.
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Published: Jan 17, 2023 15:11:37